关键词:  t-EBSD, 高分辨率, 微区分析, 晶体结构, 取向

Abstract:

The t-EBSD technique was proposed since 2012. In this paper,the principle of t-EBSD was introduced. The t-EBSD used in the materials science and the application of this technique combined with other techniques was concluded. Meanwhile,the future research of t-EBSD was proposed. At present,the t-EBSD was used in the research areas such as the super-fined grains,the large-variable metals and oxide film. In the future,the t-EBSD will be combined with more analytical techniques,and the applied range of the high resolution micro crystal structure analysis will be expanded.

Key words:  t-EBSD, high resolution, micro-area analysis, crystal structure, orientation